The semiconductor industry continues to advance, requiring new safeguards to address evolving hazards. Reorganized and with major revisions to the requirements for both gas-detection systems as well as smoke detection systems, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled -- containing a cleanroom or clean zone or both.
Chapters address every aspect of safety, from general safety precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress.
The 2018 edition of NFPA 318 assists all stakeholders involved in fire protection: engineers, AHJs, facility personnel, and contractors.