Improve chemical safety and emergency response using NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities.
The semiconductor industry continues to advance and new safeguards are required to address the ever-evolving hazards. NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities, applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development (R&D) areas in which hazardous chemicals are used, stored, and handled and areas containing a cleanroom or clean zone.
This standard can help all stakeholders involved in fire protection, including engineers, authorities having jurisdiction (AHJs), facility personnel, and contractors, to make better decisions. It addresses every aspect of safety, from general precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control stations, and means of egress.
Several revisions were made for the 2025 edition of the standard, including:
- New chapter with requirements for stacked fabrication buildings and supporting annex material
- New guidance for smoke detection in return air streams in specific cleanroom designs and configurations
- Revisions throughout to align with the terminology used in NFPA 30, Flammable and Combustible Liquids Code, for ignitible (flammable and combustible) liquids
